Glassy Carbon

Glassy Carbon, which has beeen developed by our own unique technique, is a gas impermeable, black glass like carbon product. FEATURES Lower Apparent Density Excellent Chemical Resistance Gas Impermeability High Purity Less Particle Generation No Outgassing APPLICATIONS Wafer Holders Heat Reflectors Susceptors Guide Rings Gas Diffuser Electrodes for Plasma Etching Crucibles, etc.

TYPICAL IMPURITIES
	Al	Ca	Cr	Cu	Fe	K	Na	Ni	Ti	V
ppm	<0.08	<0.04	<0.17	<0.08	<0.04	<0.1	<0.05	<0.1	<0.09	<0.07

Dimensions of Standard Products (Rods, PLates, Disks, Crucibles)

Rods		Plates
Code	Dia × Length	Code	Length × Width × Thickness
RA3-100	Ø3 x 100	SA-1	100×100×1
RA5-100	Ø5.2 x 100	SA-2	100×100×2
RA6-100	Ø6 x 100	SA-3	100×100×3

Crucibles		Disks
Code	ID × OD × Height	Code	Dia × Thickness
C-1	Ø8×Ø10×Ø10	D30-1	Ø30×1
C-4	Ø16×Ø20×Ø30	D30-2	Ø30×2
C-30	Ø36×Ø40×Ø40	D30-3	Ø30×3
C-40	Ø41×Ø45×Ø43
C-150	Ø61×Ø65×Ø63
C-200	Ø73×Ø76×Ø66

Dimensions of Semi-Standard Products (Rods, Pipes, with Lid Tubes, Crucibles)

Rods		Pipes
Code	Dia × Length	Code	ID × OD × Thickness
RA3	Ø3 × 300	P-5	Ø5×Ø7×500
RA5	Ø5.2 × 500	P-6	Ø6×Ø8×500
RA6	Ø6 × 500	P-10	Ø10×Ø13×500
		P-16	Ø16×Ø20×500

Crucibles		With Lid Tubes
Code	ID × OD × Height	Code	ID × OD × Length
C-1	Ø8×Ø10×Ø10	PP-5	Ø5×Ø7×Ø500
C-4	Ø16×Ø20×Ø30	PP-6	Ø6×Ø8×Ø500
C-30	Ø36×Ø40×Ø40	PP-10	Ø10×Ø13×Ø500
C-40	Ø41×Ø45×Ø43	PP-16	Ø16×Ø20×Ø500
C-150	Ø61×Ø65×Ø63
C-200	Ø73×Ø76×Ø66

Heights and lengths can obtained on or under the size specified.

Tolerances

Forms		I. Dia.	O. Dia.	L. , H.	Length
Rods	RA-3		±0.2	±1
	Others		±0.3	±1
Plates				±0.3	±0.2
Disks			±0.2		±0.2
Crucibles	C-1,4,30,40	±1	±1	±2
	Others	±2	±2	±3
Pipes		±0.5	±0.5	±1
With Lid Tubes		±0.5	±0.5	±1