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SiC Coated Graphite
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Conventional CVD SiC coated graphite and newly developed CVI SiC coated graphite is available for various applications upon request.
FEATURES
- Super High Purity
- Excellent Chemical Resistance
- Excellent Thermal Shock Resistance
- Excellent Physical Shock Resistance
- Available in Complex Shapes
- Usable under Oxidising Atmosphere
APPLICATIONS
- Susceptors for Epitaxy
- Susceptors for CVD
- Heaters
- Components for Crystal Pullers, etc.
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TYPICAL PROPERTIES
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BASE GRAPHITE
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UNITS
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Apparent Density
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1.85
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g/cm3
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Flexural Strength
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49
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MPa
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Shore Hardness
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58
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(-)
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Electrical Resistivity
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11
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μΩm
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Thermal Conductivity(RT)
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116
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W/mK
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Ash Content
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<5
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ppm
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TYPICAL IMPURITIES
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Al
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Ca
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Cr
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Cu
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Fe
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K
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Na
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Ni
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Ti
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V
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ppb
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20
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16
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9
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13
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31
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58
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3
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6
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3
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<1
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