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Solid SiC
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Solid SiC, which has been developed by our unique technology, is a super high purity SiC made by Chemical Vapor Deposition process.
FEATURES
- Super High Purity
- Excellent Chemical Resistance
- Very Little Metal Diffusion
- No Outgassing
- Theoretical Density (β-SiC)
APPLICATIONS
- Wafer Carriers
- Susceptors, Dummy Wafer
- Guide Rings
- Parts for Etching System, etc.
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TYPICAL PROPERTIES
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Solid SiC
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UNITS
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Density
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3.21
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g/cm3
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Flexural Strength
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590
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MPa
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Youngs Modulus
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450
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GPa
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Vickers Hardness
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26
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GPa
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Electrical Resistivity
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1
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μΩm
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Thermal Conductivity(RT)
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250
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W/mK
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C.T.E(RT-1000°C)
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4.0
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×10-6/K
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TYPICAL IMPURITIES
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Al
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Ca
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Cr
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Cu
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Fe
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K
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Na
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Ni
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Ti
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V
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ppb
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20
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16
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9
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13
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31
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58
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3
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6
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3
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<1
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